dc.contributor.author | Whittaker, Jed D. | |
dc.contributor.author | Brink, Markus | |
dc.contributor.author | Husseini, Ghaleb | |
dc.contributor.author | Linford, Matthew R. | |
dc.contributor.author | Davis, Robert C. | |
dc.date.accessioned | 2021-01-13T07:41:40Z | |
dc.date.available | 2021-01-13T07:41:40Z | |
dc.date.issued | 2003 | |
dc.identifier.citation | Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition, Jed D. Whittaker, Markus Brink ,Ghaleb A. Husseini and Matthew R. Linford, Robert C. Davis, Applied Physics Letters, 83, 5307-5309 (2003) https://doi.org/10.1063/1.1636267 | en_US |
dc.identifier.issn | 1077-3118 | |
dc.identifier.uri | http://hdl.handle.net/11073/20685 | |
dc.description.abstract | A self-aligned thin-film deposition technique was developed to mechanically attach carbon nanotubes to surfaces for the fabrication of structurally robust nanotube-based nanomechanical devices. Single-walled carbon nanotubes were grown by thermal chemical-vapor deposition (CVD) across 150-nm-wide SiO2 trenches. The nanotubes were mechanically attached to the trench tops by selective silicon tetraacetate-based SiO2 CVD. No film was deposited on the nanotubes where they were suspended across the trenches. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | American Institute of Physics (AIP) | en_US |
dc.relation.uri | https://doi.org/10.1063/1.1636267 | en_US |
dc.subject | Metal oxides | en_US |
dc.subject | Silicates | en_US |
dc.subject | Chemical vapor deposition | en_US |
dc.subject | Chemical elements | en_US |
dc.subject | Thin film deposition | en_US |
dc.subject | Nanotubes | en_US |
dc.title | Self-aligned mechanical attachment of carbon nanotubes to silicon dioxide structures by selective silicon dioxide chemical-vapor deposition | en_US |
dc.type | Peer-Reviewed | en_US |
dc.type | Article | en_US |
dc.type | Published version | en_US |
dc.identifier.doi | 10.1063/1.1636267 | |