Browsing Masters Theses by Author "092711b9-85ec-4ee0-af68-321273c1ac45"
Now showing items 1-1 of 1
-
Modeling and Control of a Thermally Driven MEMS Actuator for RF Applications
Estahbanati, Shahabeddin Vamegh (2017-05)Thermally driven V-shaped microelectromechanical systems (MEMS) actuators have been used extensively in different fields of MEMS including RF MEMS applications. For this reason, developing a dynamic model is of importance ...